산업용 다관절 클린룸 로봇(로보트), 반도체제조분야, STAUBLI ROBOT

SEMICONDUCTOR APPLICATIONS



	- POLARIS 220 Microlithography cluster: wafer handling between various process models within the cluster. - ZETA Surface Conditioning System: fully automated centrifugal spray processor for performing advanced batch cleaning and etch applications on 200 & 300mm wafers. *End user or System house* FSI (USA)

Automatic wafer etching equipment with RX130 CR robot.

End user or System house
RENA (GERMANY)



	Reticle transfer and inspection with RX60 CR. *End user or System house* ZYGO (USA)



	Automatic wafer handling with RX130 CR robot. *End user or System house* INFINEON (AU)

Automated wafer handling (200 & 300 mm).
Reticle handling operation.

End user or System house
SVG-L (USA)



	Automated pellicle mounting system. *End user or System house* MATSUSHITA SEIKI (JAPAN)



	200 & 300 mm wafers handling. *End user or System house* SVG-T (USA)